微机械陀螺仪在低压环境下的性能研究

Qiancheng Zhao, Longtao Lin, J. Cui, Dachuan Liu, X. Chi, G. Yan
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引用次数: 1

摘要

本文提出了一种在低环境压力条件下测试微机械陀螺仪关键参数的有效方法,包括质量因子、驱动信号幅值、带宽和比例因子。结果表明,最佳工作压力必须限定在一定的压力范围内。
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The research on the performance of the micro-machined gyroscope at low ambient pressure
This paper proposed an effective method to test some key parameters of the micro-machined gyroscope at low ambient pressure condition including quality factor, amplitude of the drive signal, bandwidth and scale factor. The results demonstrated that the best working pressure must confine some pressure range.
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