M. Brezeanu, V. Dumitru, S. Costea, S. Z. Ali, F. Udrea, M. Gologanu, C. Bostan, I. Georgescu, V. Avramescu, O. Buiu
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SOI membrane-based pressure sensor in stress sensitive differential amplifier configuration
This paper introduces a pressure sensing structure configured as a stress sensitive differential amplifier (SSDA), built on a Silicon-on-Insulator (SOI) membrane. Theoretical calculation show the significant increase in sensitivity which is expected from the pressure sensors in SSDA configuration compared to the traditional Wheatstone bridge circuit. Preliminary experimental measurements, performed on individual transistors placed on the membrane, exhibit state-the-art sensitivity values (1.45mV/mbar).
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