GaN薄膜中光致声波电荷输运效应的研究

K. Hohkawa, C. Kaneshiro, K. Koh, Kazumi Nishimuru, N. Shigekawa
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引用次数: 7

摘要

本文研究了声波传播引起的势阱对光致载流子的输运特性。我们在Al2O3衬底上使用GaN薄膜组成的延迟线进行了基本实验。作为声波,我们在GaN薄膜中使用SAW和导波层模式,并使用与输入IDT结构相同的MSM探测器。结果表明,在两种模式下,输出二极管均能获得直流输出信号。然而,我们已经观察到一个相对复杂的现象,如直流输出信号的极性随UV强度的变化,载流子的捕获效应。我们澄清了多余的载流子或电子或空穴可以合理地解释这些效应。我们还讨论了适用于紫外传感器的器件结构。
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Study on Photo-induced Acoustic Charge Transport Effect in GaN Film
In this paper, we investigated transport characteristic of photo-induced carriers by the potential well caused by travelling acoustic wave. We have carried out a basic experiment using delay lines consisting of GaN film on Al2O3 substrate. As acoustic waves, we used SAW and guide wave layer mode in GaN thin film and employed MSM detector having the same structure as that of input IDT. The results have shown that the DC out put signals are obtained at the output diode for both modes. However, we have observed a relatively complicated phenomena, such as change on DC output signal polarity depending on the intensity of UV, trapping effect of carriers. We clarified that excess carrier either electron or hole in transported carrier would reasonably explain these effects. We also discuss device structures suitable for UV sensors.
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