柔性铰链桥式柔性机构的准静力及模态分析

Y. Ni, Z. Deng, Xiang Wu, Junbao Li, Wei Huang, Long Li
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引用次数: 1

摘要

位移放大比和输入刚度是超精密定位柔性机构设计的重要特征。早期准确的性能预测模型可以显著提高产品在超精密定位领域的可靠性和可用性,但现有的理论模型不能准确地预测产品的特性,并且很难利用这些模型进行误差补偿。本文基于超静定结构的思想,建立了计算经典桥式机械放大器性能的非正则线性齐次方程,包括力法、麦克斯韦-莫尔法和变形协调。随后,对计算结果与有限元分析进行了对比,讨论了几何参数的影响,并利用有限元模拟进行了模态分析。该分析模型可用于桥式微位移放大器的设计和验证。此外,该模型可用于任何其他过约束柔性放大器。
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Quasi-static and Modal Analysis of Bridge-Type Compliant Mechanism with Flexure Hinges
Displacement amplification ratio and input stiffness are significant design characteristics for an ultra-precision positioning flexure-based compliant mechanism. Early and accurate performance prediction models can significantly improve the reliability and availability of product in the field of ultra-precision positioning, but Existing theoretic models cannot predict its characteristics accurately and make it very difficult to error compensation by means of these models. This paper provides a set of uncanonical linear homogeneous equations for calculating a classic bridge-type mechanical amplifier performance, these closed-form equations are established based on the thought of statically indeterminate structure, including Force Method, Maxwell-Mohr Method and deformation compatibility. Subsequently, case studies involving the calculation results compared with FEA, geometric parameters' influence discussion and modal analysis using FEA simulation are presented. This proposed analytical model is applicable and reliable to the bridge-type micro-displacement amplifier design and verification. Furthermore, the present model can be used in any other over-constrained flexure-based amplifier.
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