基于多晶硅的钝化触点使工业硅太阳能电池效率高达24%

M. Stodolny, K. Tool, B. Geerligs, J. Löffler, A. Weeber, Yu Wu, J. Anker, Xiaoqian Lu, Ji Liu, P. Bronsveld, A. Mewe, G. Janssen, G. Coletti
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引用次数: 6

摘要

本文介绍了n+, p+和本征多晶硅触点的最新研究成果,包括它们与丝网印刷过火糊工业金属化工艺的接触。该综述还与该领域其他相关参与者的多晶硅钝化结果进行了比较。我们在织构表面上记录了表面钝化水平(n+多晶硅为J0~1 fA/cm2, p+和i-多晶硅为J02),并且在丝网印刷的fire-through金属触点上记录了低接触复合,n+和p+多晶硅分别达到65和200 fA/cm2。此外,硅体钝化的改进可归因于在电池工艺中引入n+多晶硅。这些结果是展示24%工业PERPoly(工业TOPCon)电池路线图的基本组成部分。
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PolySi Based Passivating Contacts Enabling Industrial Silicon Solar Cell Efficiencies up to 24%
In this paper we present our recent results on n+, p+ and intrinsic polysilicon contacts, including their contacting with industrial metallization process by screen printed fire-through pastes. The review is complemented by comparison with polysilicon passivation results by other relevant players in this field. We present record surface passivation levels on textured surfaces (J0~1 fA/cm2 for n+ polySi and J0<10 fA/cm2 for p+ and i-polySi), and record low contact recombination for screen printed fire-through metal contacts reaching down to 65 and 200 fA/cm2 for n+ and p+polySi, respectively. In addition, an improvement in the silicon bulk passivation can be attributed to the introduction of n+ polysilicon in the cell process. These results are the fundamental components to demonstrate a roadmap towards 24% industrial PERPoly (industrial TOPCon) cells.
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