多晶薄膜CuInSe2的微观结构及其对材料和器件性能影响的思考

J.R. Tuttle, D.S. Albin, R. Noufi
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引用次数: 112

摘要

对多晶薄膜CuInSe2在17 ~ 32 at组分范围内的微观结构和形貌进行了研究。%铜。晶粒尺寸随衬底温度、铜含量以及衬底类型的不同而变化,其范围为0.1 ~ 5.0 μm。富铜薄膜的形貌还取决于Cu2−δSe二元化合物的驻留形核和生长。建立了多晶薄膜CuInSe2的微观结构模型,表明晶界和自由表面Cu2−δSe析出的组分和衬底温度对其晶间组织的影响最大。近化学计量晶粒的晶内组织为有序黄铜矿与无序闪锌矿相分离的混合体,并含有CuxSe(x=0.5, 1.0, 1.5, 2.0)少数相包裹体。非化学计量的贫铜薄膜组合物还含有黄铜矿变体有序空位化合物CuIn2Se3.5的孤立颗粒。微观结构对器件性能的潜在影响包括光活性体积的减小、载流子跨相边界的输运以及输运参数与晶体尺寸的依赖。
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Thoughts on the microstructure of polycrystalline thin film CuInSe2 and its impact on material and device performance

The microstructure and morphology of polycrystalline thin film CuInSe2 were studied extensively in the compositional range 17–32 at.% Cu. The grain size varied with substrate temperature, copper content, and in variable ways with substrate type, and ranged in size from 0.1 to 5.0 μm. The morphology of copper-rich films appeared additionally to depend on the resident nucleation and growth of the Cu2−δSe binary compound. A microstructural model of polycrystalline thin film CuInSe2 is presented and suggests that the intergranular microstructure is dominated by the compositional and substrate temperature dependence of Cu2−δSe precipitation at grain boundaries and free surfaces. The intragranular microstructure of the near-stoichiometric grain is a phase-separated mixture of ordered chalcopyrite and disordered sphalerite, with CuxSe(x=0.5, 1.0, 1.5, 2.0) minority phase inclusions. Off-stoichiometric copper-poor film compositions additionally contain isolated grains of the chalcopyrite-variant ordered-vacancy compound CuIn2Se3.5. The potential ramifications of the microstructure on the device performance include a reduction in the photo-active volume, carrier transport across phase boundaries, and dependence of transport parameters on the crystallite size.

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