纳米压印光刻技术制备基于表面光栅的分布式反馈激光器

2008 IEEE International Conference on Semiconductor Electronics Pub Date : 2008-12-09 DOI:10.1109/SMICND.2008.4703337

J. Viheriala, A. Laakso, M. Dumitrescu, J. Tommila, K. Haring, T. Leinonen, S. Ranta, M. Pessa

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摘要

利用低成本的纳米压印光刻技术，制备了由脊状波导横向波纹获得三阶表面光栅的分布反馈激光器。在980 nm波长范围内发射的激光器具有稳定的单纵模工作，侧模抑制比高达50 dB。

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Surface-grating-based distributed feedback lasers fabricated using nanoimprint lithography

Distributed feedback lasers with third-order surface gratings obtained by lateral corrugations of the ridge waveguide have been fabricated using low-cost nanoimprint lithography. The lasers, emitting in the 980 nm wavelength range exhibited stable single-longitudinal-mode operation with side-mode suppression ratios up to 50 dB.

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2008 IEEE International Conference on Semiconductor Electronics

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