基于氮化铝薄膜的大扫描角压电微镜

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Pub Date : 2019-06-23 DOI:10.1109/TRANSDUCERS.2019.8808723

Katja Meinel, C. Stoeckel, M. Melzer, S. Zimmermann, R. Forke, K. Hiller, T. Otto

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引用次数: 10

摘要

本文提出了一种基于压电薄膜氮化铝(AlN)的微镜。采用150mm SOI技术成功制备了占地面积为6mm²的微系统。通过有限元法优化杆臂参数，实现了较大的倾斜角度。具有不同弹簧宽度的三种微镜类型的特征，在小于5 V的驱动电压下，在1.9 kHz时可达到51.3°，4.6 kHz时可达到31.6°，12.5 kHz时可达到16.5°。对于高达20 V的较高驱动电压，受测量设置的限制，最大扫描角达到104.9°。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Piezoelectric Scanning Micromirror with Large Scan Angle Based on Thin Film Aluminum Nitride

In this paper micromirrors based on piezoelectric thin film aluminum nitride (AlN) are presented. The microsystems with a 6 mm² footprint are fabricated successfully in 150 mm SOI technology. A large tilt angle is achieved by FEM-based optimization of the lever arm parameters. Three micromirror types with varied spring widths are characterized, achieving tilt angles up to 51.3° at 1.9 kHz, 31.6° at 4.6 kHz, and 16.5° at 12.5 kHz for an actuation voltage of less than 5 V. For higher actuation voltages up to 20 V, a maximum scan angle of 104.9° is reached, limited by the measurement setup.

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2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)

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