硅片与铝衬底的无焊剂锡键合

S. Hsu, Chu-Hsuan Sha, C. C. Lee
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引用次数: 3

摘要

铝(Al)的高导热性和轻质特性使其在大功率器件封装和汽车设计应用中成为一种有前途的材料。主要挑战是其热膨胀系数(CTE)高达23 ppm/°C。在这项研究中,我们研究了通过使用无熔剂锡(Sn)将大型硅片粘合到Al衬底上来克服这一挑战的可能性。在电子封装的所有键合结构中,Si对Al对可能具有最大的CTE不匹配。在Al基板上沉积0.1μm Cr层和0.2 μm Cu层,再电镀25 μm厚的Cu层。然后将锡焊料层电镀在Cu上,紧接着是薄的(0.1 μm)银(Ag)层。粘接过程是完全无焊剂的。接头厚度可由键合压力或铜垫片控制。利用扫描电子显微镜(SEM)和能量色散x射线能谱(EDX)研究了接头的微观组织和成分。尽管存在较大的CTE错配,但键合结构并未断裂。这一初步结果表明,铝基板在电子封装中的潜在适应性,因为铝的高CTE是避免的。
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Fluxless tin bonding of silicon chips to aluminum substrates
The high thermal conductivity and light weight properties of aluminum (Al) make it a promising material in high power device packaging and automotive design applications. A primary challenge is its high coefficient of thermal expansion (CTE) of 23 ppm/°C. In this research, we investigated the possibility of surmounting this challenge by bonding large Si chips to Al substrates using fluxless tin (Sn). Si versus Al pair probably has the largest CTE mismatch among all bonded structures in electronic packaging. In experiments, 0.1μm Cr layer and 0.2 μm Cu layer were deposited on Al substrates, followed by an electroplated thicker 25 μm copper (Cu) layer. The Sn solder layer was then electroplated over the Cu followed immediately by thin (0.1 μm) silver (Ag) layer. The bonding process is entirely fluxless. The joint thickness was controlled either by bonding pressure or by Cu spacers. Microstructure and composition of the joints were studied under scanning electron microscopy (SEM) and energy dispersive X-ray spectroscopy (EDX). Despite the large CTE mismatch, the bonded structures did not break. This preliminary result suggests potential adaption of Al substrates in electronic packaging where Al is avoided because of its high CTE.
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