二维横向功率器件冲击电离系数近似模型的数值研究

Haidong Wang, Yufeng Guo, Jun Zhang, Maolin Zhang, Jing Chen
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引用次数: 0

摘要

由于功率器件中冲击电离过程的复杂性,经典的一维Fulop和Chynoweth近似不再适用于二维横向功率器件。本文通过数值研究,探讨了在完全耗尽和部分耗尽两种情况下,冲击电离系数对二维横向功率器件结构参数的敏感性。由于二维RESURF效应,结构参数对冲击电离系数的影响更为复杂,不能简单地将其视为电场分布的函数。因此,基于二维泊松方程和雪崩击穿准则,提出了一种新的二维侧向功率器件冲击电离系数近似模型。基于该模型和二维泊松方程,雪崩击穿电压(BV)的计算具有较高的准确性和有效性。将建模结果与商用TCAD数值模拟结果进行了比较,发现两者吻合较好,为二维横向动力器件的设计与优化提供了指导。
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A Numerical Study of the Impact Ionization Coefficient Approximation Model of 2-D Lateral Power Devices
Due to the complexity of the impact ionization process in power devices, the classic 1-D Fulop and Chynoweth approximation is no longer appliable to the 2-D lateral power devices. In this paper, a numerical study is conducted to explore the sensitivity of the impact ionization coefficient on the structure parameters of 2-D lateral power devices in both full- and partial-depletion cases. As a result of the 2-D RESURF effect, the structure parameters are imposing a more complicated influence on the impact ionization coefficient and therefore can not be simply considered as a function of electric field profile. Therefore, based on the 2-D Poisson’s equation and avalanche breakdown criteria, a new impact ionization coefficient approximation model for a 2-D lateral power device is presented. Based on the proposed model and 2-D Poisson’s equation, the avalanche breakdown voltage (BV) can be obtained with high veracity and effectiveness. The modeling results are compared with simulations obtained by commercial TCAD numerical simulations, which are found to be in good agreement and provide guidance for the design and optimization of 2D lateral power devices.
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