基于高分辨率三维x射线显微镜的半导体(led)质量控制

Diogo Da Costa, M. D. dos Anjos, D. Oliveira, Alessandra Machado, Joaquim Teixeira de Assis, Ricardo Lopes
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引用次数: 1

摘要

电子设备每次都变得越来越小,技术也越来越复杂。通常发现的问题,如回流焊和开焊连接,这些问题大多难以通过x射线图像或横切面上的物理切割等传统手段检测到。除了发现这些缺陷的挑战之外,使用破坏性分析技术(如财政横向切割和化学脱囊)暴露这些缺陷也可能出现一些问题。这两种技术都可能导致与缺陷所在位置无关的损害,或消除缺陷或损坏部位的证据。高分辨率3D x射线计算机微断层扫描为涉及半导体器件分析的问题提供了强大的替代解决方案和非侵入性。本研究设想了基于x射线计算机微层析成像的半导体完整性研究。使用SkyScan 1272布鲁克商用设备分析了一组10个led的P-N结,在非极化条件下及其接触端子的电气过应力效应。在三个空间方向(x, y和z)上分析了pn结的尺寸,并研究了LED损坏时发生的影响。关于计算机显微断层扫描的完整性研究方法已经显示了包括结果,允许理解LED结构上发生的事情,并调查允许对其质量做出决定的事项,从而完成本研究指定的目标。
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Semiconductors (LEDs) quality control based in high-resolution 3D X-ray microscope
Electronic devices are getting smaller each time and the technology, increasingly complex. Commonly found problems such as reflow soldering and open solder connections, which are mostly difficult to detect by conventional means like X-ray images or physical cut on the transverse section. Along with the challenge of finding these flaws, there are also some problems that may arise on the exposure of them using destructive analysis techniques, such as the fiscal transversal cut and chemical decapsulation. Both techniques may induce damage not relevant to where that flaw is located or remove evidence of a flaw or a damaged place. The high-resolution 3D x-ray computerized microtomography provides a powerful alternative solution and non-invasive to issues that involve the analysis of semiconductor devices. This research contemplates the study of semiconductor’s integrity (LED’s) based of X-ray computerized microtomography. The SkyScan 1272 Bruker commercial equipment was used for analysis of the P-N junction in a set with 10 LEDs, under non polarized conditions and upon electrical overstress effects on its contact terminals. The P-N junction had their dimensions analyzed on the three spatial directions (x, y and z) and studied on the effects that occur when a LED is damaged. The study methodology of integrity regarding computerized microtomography have shown consist outcomes that allowed the understanding of what occurs on the LED's structure and investigates matters that allows decisions to be made regarding its quality, and so, accomplishing the goals designated on this research.
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