快速热加工制备CuInSe2薄膜

G.D. Mooney , A.M. Hermann, J.R. Tuttle, D.S. Albin, R. Noufi
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引用次数: 10

摘要

通过对真空沉积的铜、铟和硒进行快速热处理,形成了多晶薄膜CuInSe2。薄膜在三个组成区域制备和表征:贫铜(约20 at;%铜)。化学计量学(25 at.)% Cu)和富铜(约28 at。%铜)。介绍了表征结果,包括x射线衍射分析、用于微量分析的电子探针、扫描电子显微镜以及光学反射和透射测量。结果表明,共沉积前驱体在沉积后退火时间小于2 min的情况下形成了接近单相的材料。薄膜具有适合光伏器件制造的光滑形貌,光学吸收系数在104 cm−1的高范围内,光学带隙为1.0 eV。
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The formation of CuInSe2 thin films by rapid thermal processing

Formation of polycrystalline thin film CuInSe2 was achieved by the rapid thermal processing of vacuum-deposited copper, indium, and selenium. Films were fabricated and characterized in three composition regions: copper-poor (approximately 20 at.% Cu). stoichiometric (25 at.% Cu) and copper-rich (approximately 28 at.% Cu). Characterization results including X-ray diffraction analysis, electron probe for microanalysis, scanning electron microscopy, and optical reflection and transmission measurements are presented. The results show that nearly single-phase material has been formed from co-deposited precursors with a post-deposition annealing time of less than 2 min. The films have smooth morphologies amenable for photovoltaic device fabrication, optical absorption coefficients in the high 104 cm−1 range, and an optical band gap of 1.0 eV.

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