用于非易失性存储器和神经形态计算的氧化物的电阻开关

S. Spiga
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引用次数: 0

摘要

只提供摘要形式。氧化物中的电阻开关(RS)现象在超尺度和高密度非易失性存储器中引起了很大的兴趣,并且在工业水平上提出了许多原型。近年来,RS也被用于新型应用,如可重构逻辑学和突触电子学。在后一个领域,兴趣是RS设备,可用于制造人工突触,能够模拟生物突触的突触功能,并与标准CMOS电路集成以构建神经形态系统。这些RS器件也被称为忆阻系统,由于其简单的双端结构,低功耗运行,高可扩展性,低热预算制造以及根据材料系统易于集成到基于CMOS的平台而受到特别关注。本讲座将首先介绍非易失性记忆的最新技术和材料系统,以及神经形态电路的突触装置,重点介绍材料/装置与目标应用的差异。然后,演讲将介绍我们在HfO2和al -掺杂HfO2的RS器件方面的最新进展。采用原子层沉积法制备了氧化层(二元氧化物和掺杂氧化物),并从微观到纳米尺度分析了其电阻开关性能。利用嵌段共聚物光刻技术,实现了高密度纳米级hfox基忆阻器件的制备。此外,鉴于这些装置作为突触元件的应用,不同的脉冲操作方案具有不同的长期可塑性,如生物突触的增强和抑制。特别强调了基于同一脉冲序列的编程算法。将表明,仔细选择脉冲幅度/脉冲宽度组合是实现器件模拟调制的基础。
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Resistive switching in oxides for nonvolatile memories and neuromorphic computing
Summary form only given. Resistive switching (RS) phenomena in oxides have received a large interest for ultra-scaled and high-density non-volatile memories, and many prototypes have been proposed at industrial level. Recently, RS have been also exploited for new type of applications, such as reconfigurable logic and synaptic electronics. In the latter field, the interest is towards RS devices which can be used to fabricate artificial synapses, able to emulate the synaptic functions of biological synapses, and to be integrated with standard CMOS circuits to build neuromorphic systems. These RS devices, also named memristive systems, are of particular interest due to their simple two terminal structure, low power operation, high-scalability, low thermal budget fabrication and, depending on material system, easy integration into CMOS based platform. This talk will first introduce the current state of the art and materials systems investigated for non-volatile memories as well as synaptic devices for neuromorphic circuits, highlighting the materials/device differences versus target application. Then, the talk will present our recent advancements on HfO2 and Al-doped-HfO2 based RS devices. The oxide layers (binary and doped oxides) are deposited by atomic layer deposition and the resistive switching properties are analysed from micro- to nanoscale. The fabrication of high-density and nanoscale HfOx-based memristive devices is achieved by block-copolymer lithography. Furthermore, in view of application of these devices as synaptic elements, the long term plasticity, as potentiation and depression typical of biological synapses, are characterized by various pulsed operation schemes. Special emphasis is given to programming algorithms based on a train of identical pulses. It will be shown that a careful choice of the pulse amplitude/pulse width combination is fundamental to achieve an analogue modulation of the device.
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