{"title":"一种新型波束刚体MEMS陀螺仪在调频模式下的应用","authors":"S. A. M. Lajimi, G. Heppler, E. Abdel-Rahman","doi":"10.1109/NEMS.2014.6908880","DOIUrl":null,"url":null,"abstract":"For a new type of a MEMS gyroscope made of a cantilever beam and an end-rigid-body, the reduced-order (discretized) model is obtained by using the method of assumed modes. The discretized model's static behavior is verified by comparing with the stationary partial differential governing equations. The free dynamics of the system are studied under a constant input voltage. The gyroscopic natural and pseudo-natural frequencies of the system are obtained. To operate the gyroscope in the frequency-modulation mode, the input angular rate is computed in analytical and numerical form.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"47 1","pages":"586-591"},"PeriodicalIF":0.0000,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"The application of a new beam-rigid body MEMS gyroscope in the frequency-modulation mode\",\"authors\":\"S. A. M. Lajimi, G. Heppler, E. Abdel-Rahman\",\"doi\":\"10.1109/NEMS.2014.6908880\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"For a new type of a MEMS gyroscope made of a cantilever beam and an end-rigid-body, the reduced-order (discretized) model is obtained by using the method of assumed modes. The discretized model's static behavior is verified by comparing with the stationary partial differential governing equations. The free dynamics of the system are studied under a constant input voltage. The gyroscopic natural and pseudo-natural frequencies of the system are obtained. To operate the gyroscope in the frequency-modulation mode, the input angular rate is computed in analytical and numerical form.\",\"PeriodicalId\":22566,\"journal\":{\"name\":\"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)\",\"volume\":\"47 1\",\"pages\":\"586-591\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2014-04-13\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/NEMS.2014.6908880\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NEMS.2014.6908880","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
The application of a new beam-rigid body MEMS gyroscope in the frequency-modulation mode
For a new type of a MEMS gyroscope made of a cantilever beam and an end-rigid-body, the reduced-order (discretized) model is obtained by using the method of assumed modes. The discretized model's static behavior is verified by comparing with the stationary partial differential governing equations. The free dynamics of the system are studied under a constant input voltage. The gyroscopic natural and pseudo-natural frequencies of the system are obtained. To operate the gyroscope in the frequency-modulation mode, the input angular rate is computed in analytical and numerical form.
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