焦耳加热对无铅互连电迁移可靠性的影响

Minhua Lu, S. Wright, Gerard McVicker, S. M. Sri-Jayantha
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引用次数: 7

摘要

温度和电流是影响电迁移可靠性的两个主要参数。由于在加速电迁移试验中使用的大电流,与应力电流相关的焦耳自热可能是显著的。本文从局域焦耳加热的角度对无铅互连中的电迁移失效进行了研究。考虑了两种封装中的焦耳热效应,一种是具有标准C4s的完全组装倒装芯片模块,另一种是具有微凸点的硅对硅组件。采用热有限元模型作为解释实验结果的指导。
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Effect of Joule heating on electromigration reliability of Pb-free interconnect
Temperature and current are two major parameters that impact electromigration reliability. Due to the large current used in the accelerated electromigration test, the Joule self-heating associated with the stress current can be significant. The paper presents a study of electromigration fails in Pb-free interconnect from the point of view of localized Joule heating. The Joule heating effect in two types of packages, a fully assembled flip chip module with standard C4s and a silicon to silicon assembly with microbumps, is considered. A thermal FEM model is used as a guide to interpret the experimental observations.
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Parasitic electrical and electromagnetic effects Heat management Passive electronic components Interconnection technology Reliability and maintainability
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