{"title":"生物纳米机电系统:未来的发展方向?","authors":"L. Nicu, T. Leichlé","doi":"10.1109/SMICND.2012.6400697","DOIUrl":null,"url":null,"abstract":"Despite the fact that bio-nano-electromechanical systems (bioNEMS) are considered as the ultimate mechanical systems for complex biosensing, one still has to demonstrate that highly sensitive nanomechanical elements can be readily mass-produced in terms of both fabrication and biofunctionalization technologies. In this paper, we discuss a fundamental change of technological paradigm based on nanoprinting-techniques which implementation will successfully address all the bioNEMS-related issues at once. The choice of the nanoprinting-based techniques as a generic way to both fabricating (by transfer-printing) and functionalizing (by nano-contact printing) ultra-dense arrays of NEMS (thousands per cm2) could lead to easy-to implement, flexible recipes for front-end and back-end processing while avoiding a long series of technological steps which most of the times dramatically impacts the yield, and subsequently the cost of fabrication.","PeriodicalId":9628,"journal":{"name":"CAS 2012 (International Semiconductor Conference)","volume":"126 1","pages":"51-56"},"PeriodicalIF":0.0000,"publicationDate":"2012-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Nanoelectromechanical systems for biology: Where to go from now?\",\"authors\":\"L. Nicu, T. Leichlé\",\"doi\":\"10.1109/SMICND.2012.6400697\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Despite the fact that bio-nano-electromechanical systems (bioNEMS) are considered as the ultimate mechanical systems for complex biosensing, one still has to demonstrate that highly sensitive nanomechanical elements can be readily mass-produced in terms of both fabrication and biofunctionalization technologies. In this paper, we discuss a fundamental change of technological paradigm based on nanoprinting-techniques which implementation will successfully address all the bioNEMS-related issues at once. The choice of the nanoprinting-based techniques as a generic way to both fabricating (by transfer-printing) and functionalizing (by nano-contact printing) ultra-dense arrays of NEMS (thousands per cm2) could lead to easy-to implement, flexible recipes for front-end and back-end processing while avoiding a long series of technological steps which most of the times dramatically impacts the yield, and subsequently the cost of fabrication.\",\"PeriodicalId\":9628,\"journal\":{\"name\":\"CAS 2012 (International Semiconductor Conference)\",\"volume\":\"126 1\",\"pages\":\"51-56\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"CAS 2012 (International Semiconductor Conference)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SMICND.2012.6400697\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"CAS 2012 (International Semiconductor Conference)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMICND.2012.6400697","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Nanoelectromechanical systems for biology: Where to go from now?
Despite the fact that bio-nano-electromechanical systems (bioNEMS) are considered as the ultimate mechanical systems for complex biosensing, one still has to demonstrate that highly sensitive nanomechanical elements can be readily mass-produced in terms of both fabrication and biofunctionalization technologies. In this paper, we discuss a fundamental change of technological paradigm based on nanoprinting-techniques which implementation will successfully address all the bioNEMS-related issues at once. The choice of the nanoprinting-based techniques as a generic way to both fabricating (by transfer-printing) and functionalizing (by nano-contact printing) ultra-dense arrays of NEMS (thousands per cm2) could lead to easy-to implement, flexible recipes for front-end and back-end processing while avoiding a long series of technological steps which most of the times dramatically impacts the yield, and subsequently the cost of fabrication.