CO2激光器用线栅偏振器的优化设计

P. Logofatu, D. Apostol, A. Dinescu, R. Muller, D. Cristea
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引用次数: 0

摘要

金属光栅(线栅)具有高消光比的高效偏振器功能。偏振效应是由于这些光栅作为平行于线的偏振的金属,反射大部分,吸收其余的,作为垂直于线的偏振的电介质,大量传输。对这种行为给出了简短的半直观的解释。设计了一种用于CO2激光器的线栅偏振器,然后根据可用光刻工艺的具体情况对光栅的参数进行了优化。从实际应用的角度出发,对最佳偏振器参数集及其性能进行了讨论。
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Optimization of wiregrid polarizers for CO2 laser
Metallic gratings (wiregrids) can function as efficient polarizers with high extinction ratio. The polarizing effect is due to the fact that these gratings act as a metal for the polarization parallel to the lines, reflecting most of it and absorbing the rest, and as a dielectric for the polarization perpendicular to the lines, transmitting profusely. A short semi-intuitive explanation of this behavior is given. A wiregrid polarizer for the CO2 lasers is designed and then the parameters of the grating that can be varied - according to the specifics of the available lithographic procedure - are optimized. The sets of optimum polarizer parameters together with the corresponding performances are listed and discussed from a practical point of view.
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