原子层材料制造

IF 16.1 1区工程技术 Q1 ENGINEERING, MANUFACTURING International Journal of Extreme Manufacturing Pub Date : 2023-08-24 DOI:10.1088/2631-7990/acf3b8

Xinwei Wang, Rong Chen, Shuhui Sun

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引用次数: 0

摘要

材料和界面的原子尺度工程在材料制造中变得越来越重要。原子层沉积(ALD)技术可以提供许多独特的性能，以实现原子尺度材料制造的可控性。本文讨论了该技术的应用、特性、技术现状和面临的挑战。我们预计，在未来几年，ALD技术将继续为各个行业和技术做出重大贡献。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Material manufacturing from atomic layer

Atomic scale engineering of materials and interfaces has become increasingly important in material manufacturing. Atomic layer deposition (ALD) is a technology that can offer many unique properties to achieve atomic-scale material manufacturing controllability. Herein, we discuss this ALD technology for its applications, attributes, technology status and challenges. We envision that the ALD technology will continue making significant contributions to various industries and technologies in the coming years.

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来源期刊

International Journal of Extreme Manufacturing Engineering-Industrial and Manufacturing Engineering

CiteScore

17.70

自引率

6.10%

发文量

审稿时长

12 weeks

期刊介绍： The International Journal of Extreme Manufacturing (IJEM) focuses on publishing original articles and reviews related to the science and technology of manufacturing functional devices and systems with extreme dimensions and/or extreme functionalities. The journal covers a wide range of topics, from fundamental science to cutting-edge technologies that push the boundaries of currently known theories, methods, scales, environments, and performance. Extreme manufacturing encompasses various aspects such as manufacturing with extremely high energy density, ultrahigh precision, extremely small spatial and temporal scales, extremely intensive fields, and giant systems with extreme complexity and several factors. It encompasses multiple disciplines, including machinery, materials, optics, physics, chemistry, mechanics, and mathematics. The journal is interested in theories, processes, metrology, characterization, equipment, conditions, and system integration in extreme manufacturing. Additionally, it covers materials, structures, and devices with extreme functionalities.