基于MEMS器件的能量清除方法研究

G. De Pasquale, A. Somà
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引用次数: 11

摘要

本文主要研究了能量清除器的MEMS器件的设计方法;考虑了从振动到电压的两种转换策略:静电电容和压电。推导了电容结构的主要分析关系,并将其用于对工作频率和最终应用的扫掠功率的定量估计。
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Investigations on energy scavenging methods using MEMS devices
This work is focused on the design approach to MEMS devices for the energy scavenge; two conversion strategies from vibrations to voltage are considered: electrostatic capacitive and piezoelectric. Main analytical relations for capacitive structures are derived and used for a quantitative estimation of the power scavenged with respect to the operation frequency and to eventual applications.
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