依赖于电迁移的参数产率估计

Q3 Arts and Humanities Giornale di Storia Costituzionale Pub Date : 2004-12-13 DOI:10.1109/ICECS.2004.1399629
R. Barsky, I. Wagner
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引用次数: 11

摘要

我们定义并研究了超大规模集成电路制造过程中由点状缺陷引起的电迁移故障问题。对一种简单的布局进行了分析,并对较为复杂的情况进行了仿真。结果表明,在某些情况下,与电迁移相关的参数故障可以对总产量估计做出重大贡献。
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Electromigration-dependent parametric yield estimation
We define and investigate the problem of electromigration faults caused by spot defects during the VLSI manufacturing process. Analysis is given for a simple layout, and simulations are presented and discussed for a more complicated case. It is shown that in some cases, electromigration-dependent parametric faults can make a significant contribution to the total yield estimation.
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Giornale di Storia Costituzionale
Giornale di Storia Costituzionale Arts and Humanities-History
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