大面积薄膜太阳能电池的光学成像

Z. Huang, Jie Chen, M. Sestak, D. Attygalle, L. R. Dahal, Meghan R. Mapes, D. Strickler, K. Kormanyos, C. Salupo, R. Collins
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引用次数: 12

摘要

以氢化非晶硅(a-Si:H)和碲化镉(CdTe)薄膜光伏(PV)技术为例,证明了多通道椭圆偏振光谱(SE)在玻璃上的映射能力。已获得40 × 80平方厘米的地图。对于a-Si:H,确定了整体i层厚度和带隙以及表面粗糙度层厚度的分布图。对于CdTe,已经确定了CdS窗口层厚度图,并有望进行晶粒结构测绘。在这两种情况下,已经确定了底层透明导电氧化物(TCO)层的厚度和性质图。这些初步结果证明了映射SE的能力,以指导薄膜PV沉积工艺的扩大。
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Optical mapping of large area thin film solar cells
The mapping capability of multichannel spectro-scopic ellipsometry (SE) has been demonstrated with examples from hydrogenated amorphous silicon (a-Si:H) and CdTe thin film photovoltaics (PV) technologies on glass. Maps as large as 40 x 80 cm2 have been obtained. For a-Si:H, maps of the bulk i-layer thickness and band gap as well as surface roughness layer thickness have been determined. For CdTe, a map of the CdS window layer thickness has been determined with the prospect of grain structure mapping. In both cases, maps of the thickness and properties of the underlying transparent conducting oxide (TCO) layers have been determined. These first results demonstrate the ability of mapping SE to guide scale-up of thin film PV deposition processes.
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