背势垒层厚度对AlGaN/GaN MOS-HEMT器件性能的影响

Aboo Bakar Khan
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引用次数: 2

摘要

在这项工作中,我们研究了背势垒层厚度变化对0.5 μm肖特基栅长度的AlGaN/GaN金属氧化物半导体高电子迁移率晶体管(MOS-HEMT)器件的影响。GaN背势垒层相对于GaN通道层增加了导带,使更多的电子约束进入GaN通道层,提高了GaN通道层的高频性能。采用水动力迁移率模型,利用二维TCAD Atlas Silvaco数值模拟工具对后障层厚度的影响进行了研究。由于在MOS-HEMT器件的AlGaN/GaN异质界面处存在大量的二维电子气(2-DEG)密度,从而获得较高的漏极电流密度。在改变背势垒层厚度的情况下,对各种器件参数进行了二维模拟,如转移特性(Id-Vg)、漏极电流(Id-Vd)、跨导(gm)、漏极诱导势垒降低(DIBL)、导带能量和进入通道的电子浓度。在此仿真中,我们还测试了AlGaN/GaN MOS-HEMT器件的栅极源电容(Cgs)和电流增益截止频率等射频性能。通过改变AlGaN背势垒层厚度得到的结果可以更好地解决未来模拟和射频器件的应用。版权所有©2018 VBRI出版社。
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Influence of back barrier layer thickness on device performance of AlGaN/GaN MOS-HEMT
In this work, we have performed the influence of back barrier layer thickness variation on AlGaN/GaN Metal Oxide Semiconductor High Electron Mobility Transistor (MOS-HEMT) device with 0.5 μm Schottky gate length. The AlGaN back barrier layer presented increases the conduction band with respect to GaN channel layer so that more no of electron confinement into the GaN channel layer and improve the high-frequency performance. The effect of the back-barrier layer thickness is performed by using 2-D TCAD Atlas Silvaco numerical simulation tool by taking Hydrodynamic mobility model. Due to a large amount of two-dimensional electron gas (2-DEG) density at the AlGaN/GaN heterointerface of the MOS-HEMT device higher drain current density is obtained. The 2-D simulation is carried out with a variation of back barrier layer thickness for various device parameter such as transfer characteristics (Id-Vg), drain current with a drain voltage (Id-Vd), transconductance (gm), drain induced barrier lowering (DIBL), conduction band energy and electron concentration into the channel. In this simulation, we have also performed the RF performance like a gate to source capacitance (Cgs) and current gain cut-off frequency of AlGaN/GaN MOS-HEMT device. The results obtained by variation of AlGaN back barrier layer thickness can be a better solution in future analog and RF device application. Copyright © 2018 VBRI Press.
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