石英玻璃坩埚的现状

S. Noh, N. Kang, Heuikeun Yun, Hyeongjun Kim
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引用次数: 1

摘要

石英玻璃坩埚是制造半导体和太阳能电池等硅锭的基本材料。用于半导体和太阳能电池的石英玻璃坩埚类似,但在表面纯度、结构和耐用性方面有所不同。近年来,由于国外的问题,半导体用超高纯度合成玻璃坩埚变得越来越重要。在国内,10多年来成功生产了28英寸的石英玻璃坩埚。但用于生产半导体用硅锭的32英寸合成石英玻璃还达不到先进技术水平,预计技术差距为2 ~ 3年。为了克服这些技术差距,实现合成石英玻璃制品的国产化,还必须实现生产企业与需求企业的密切合作,实现合成石英玻璃粉的国产化。此外,如果能增加政府的支持,可以预期更快的结果。
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Status of Quartz Glass Crucible
s A quartz glass crucible is the essential material for manufacturing silicon ingots such as semiconductors and solar cells. Quartz glass crucibles for semiconductors and solar cells are made similar, but differ in surface purity, structure and durability. Recently, ultra high purity synthetic glass crucibles for semiconductors have become more important due to foreign problems. In Korea, it has succeeded in producing 28-inch quartz glass crucibles through the past 10 years. However, 32-inch synthetic quartz glass for the production of silicon ingots for semiconductors is not up to the level of advanced technology, and the technology gap is expected to be 2 to 3 years. In order to overcome these technological gaps and localize synthetic quartz glass ware, close cooperation between production companies and demand companies and localization of synthetic quartz glass powder must also be made. In addition, if government support can be added, faster results can be expected.
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