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引用次数: 3

摘要

在本文中,我们展示了一种高产量流体自组装(FSA)技术来转移氮化镓(GaN)微芯片,该芯片可用于微型led显示。在加热的溶液中,通过简单的摇动运动组装衬底上的低熔点合金和芯片的金属电极。19,000多个直径为45um的蓝色GaN微芯片在1分钟内以99.90%的良率精确组装。在芯片尺寸小于50um的情况下,通过使用新的组装解决方案和芯片设计,组装良率得到了显着提高。这一低成本、快速的演示证明了FSA是一种适合于微型led显示的传质技术。
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Fluidic Self-Assembly Transfer Technology for Micro-Led Display
In this paper, we present a demonstration of high yield Fluidic Self-Assembly (FSA) technology to transfer gallium nitride (GaN) microchips which can be used for Micro-LED display. The low melting point alloy on the substrate and the metal electrode of the chip were assembled in heated solution by a simple shaking motion. More than 19,000 blue GaN microchips with 45um in diameter were precisely assembled at 99.90% yield within 1 min. At the chip sizes below 50um, this dramatic improvement in assembly yield was achieved by using a new assembly solution and chip designs. This low cost and fast demonstration has proven that FSA is a suitable mass transfer technology which is applicable to Micro-LED display after some further development.
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