{"title":"一种用于低频无线电力传输的高性能电动力微型接收器","authors":"M. A. Halim, S. E. Smith, J. Samman, D. Arnold","doi":"10.1109/MEMS46641.2020.9056444","DOIUrl":null,"url":null,"abstract":"We report the design, fabrication and characterization of a microfabricated electrodynamic wireless power transmission (EWPT) receiver that uses a bulk-micromachined silicon serpentine torsional suspension, NdFeB magnets, and precision-manufactured micro-coils. The 0.31 cm3 device generates 2.46 mW average power (7.9 mW/cm3) at a distance of 4 cm from a transmitter coil operating at 821 Hz and safely within allowable human exposure limits. Compared to a previously reported prototype, this micro-receiver is ∼40% smaller, offers ∼16x better magnetic field sensitivity and 1.7x higher power density for improved applicability for wirelessly charging wearable and bio-implantable devices.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"25 1","pages":"590-593"},"PeriodicalIF":0.0000,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":"{\"title\":\"A High-Performance Electrodynamic Micro-Receiver for Low-Frequency Wireless Power Transfer\",\"authors\":\"M. A. Halim, S. E. Smith, J. Samman, D. Arnold\",\"doi\":\"10.1109/MEMS46641.2020.9056444\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We report the design, fabrication and characterization of a microfabricated electrodynamic wireless power transmission (EWPT) receiver that uses a bulk-micromachined silicon serpentine torsional suspension, NdFeB magnets, and precision-manufactured micro-coils. The 0.31 cm3 device generates 2.46 mW average power (7.9 mW/cm3) at a distance of 4 cm from a transmitter coil operating at 821 Hz and safely within allowable human exposure limits. Compared to a previously reported prototype, this micro-receiver is ∼40% smaller, offers ∼16x better magnetic field sensitivity and 1.7x higher power density for improved applicability for wirelessly charging wearable and bio-implantable devices.\",\"PeriodicalId\":6776,\"journal\":{\"name\":\"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)\",\"volume\":\"25 1\",\"pages\":\"590-593\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"7\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMS46641.2020.9056444\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMS46641.2020.9056444","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A High-Performance Electrodynamic Micro-Receiver for Low-Frequency Wireless Power Transfer
We report the design, fabrication and characterization of a microfabricated electrodynamic wireless power transmission (EWPT) receiver that uses a bulk-micromachined silicon serpentine torsional suspension, NdFeB magnets, and precision-manufactured micro-coils. The 0.31 cm3 device generates 2.46 mW average power (7.9 mW/cm3) at a distance of 4 cm from a transmitter coil operating at 821 Hz and safely within allowable human exposure limits. Compared to a previously reported prototype, this micro-receiver is ∼40% smaller, offers ∼16x better magnetic field sensitivity and 1.7x higher power density for improved applicability for wirelessly charging wearable and bio-implantable devices.
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