三维堆叠封装器件失效分析中的热力学分析

Xu Wang, Zhimin Ding, Chao Duan, Meng Meng, Yudong Liu, Zhibin Wang, Xiangtian Yu
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引用次数: 0

摘要

三维(3D)堆叠封装器件采用环氧树脂封装材料将多个组件或芯片在垂直方向进行集成,并采用多种新型互连技术实现组件的垂直互连。本文介绍了一种具有垂直电气连接的三维堆叠封装组件的表面涂层被表面金属涂层开裂的案例。通过对堆积包装材料的分析和工艺讨论,明确了堆积包装材料的失效机理,找出了堆积包装材料失效的原因。最后给出了几种保证环氧封装三维器件环氧固化质量的方法。
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Thermodynamic Analysis in Failure Analysis of 3D Stacked Package Devices
Three-dimensional(3D) stacked packaging devices use epoxy packaging materials to integrate multiple components or chips in the vertical direction, and adopt various new interconnection technologies to realize the vertical interconnection of components. This article introduces a case of cracking on the surface coating of a 3D stacked package component with a vertical electrical connection by the surface metal coating. Through the analysis of the stacked packaging material and discussion of the process, the failure mechanism is clearly obtained and the cause of the failure was found out. Finally, several quality assurance methods to ensure the epoxy curing quality of epoxy-encapsulated 3D devices are given.
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