溅射工艺参数对ZnO薄膜光学和结构特性影响的建模与分析

{"title":"溅射工艺参数对ZnO薄膜光学和结构特性影响的建模与分析","authors":"S. Boral, S. Tripathi","doi":"10.1166/MAT.2018.1504","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":18271,"journal":{"name":"Materials Focus","volume":"123 1","pages":"284-294"},"PeriodicalIF":0.0000,"publicationDate":"2018-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Modeling and Analysis of Sputtering Process Parameter Dependence on Optical and Structural Properties of ZnO Thin Film\",\"authors\":\"S. Boral, S. Tripathi\",\"doi\":\"10.1166/MAT.2018.1504\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":18271,\"journal\":{\"name\":\"Materials Focus\",\"volume\":\"123 1\",\"pages\":\"284-294\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-04-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Materials Focus\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1166/MAT.2018.1504\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Materials Focus","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1166/MAT.2018.1504","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}