光伏用Cu沉积CdTe薄膜退火时间影响的研究

K. S. Rahman, N. Khan, M. Imamzai, M. Akhtaruzzaman, K. Sopian, Z. Alothman, N. Amin
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引用次数: 1

摘要

首先,利用射频磁控溅射技术,在300℃下将碲化镉(CdTe)薄膜沉积在清洗过的钠石灰玻璃衬底上。然后在CdCl2处理过的CdTe薄膜上溅射5分钟,在200℃下沉积Cu薄膜。随后,CdTe和Cu堆在真空炉中400°C退火15分钟、20分钟和25分钟。采用XRD、AFM和霍尔效应测试方法,研究了不同退火时间对Cu溅射CdTe薄膜结构、形貌和电学性能的影响。XRD谱图显示,在所有退火时间均存在一个CdTe峰,对应2θ= 23.80处的(111)幼体反射面,另一个低强度Cu2Te峰对应2θ= 24.80处的(200)六边形反射面。从AFM图像中观察表面粗糙度和形貌。由于退火时间的不同,膜的表面粗糙度发生了显著的变化。退火时间越短,表面粗糙度值越高。散货船密度约为1018cm-3。在退火15 min的薄膜中,7.1×1018cm-3的载流子浓度最高。
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Investigation of the annealing time effects on Cu deposited CdTe thin films for photovoltaic application
Firstly, Cadmium Telluride (CdTe) thin films have been deposited on cleaned soda lime glass substrates at 300°C by using the RF magnetron sputtering technique. After that, Cu thin film was deposited for 5 minutes at 200°C on top of CdCl2 treated CdTe thin films by sputtering. Subsequently, CdTe and Cu stacks were annealed at 400°C for 15 minutes, 20 minutes and 25 minutes in a vacuum furnace. The influence of different annealing times on the structural, topographical and electrical properties of Cu sputtered CdTe thin films were then examined by XRD, AFM and Hall Effect measurement, respectively. XRD patterns reveal that, one CdTe peak corresponding to the (111)cub reflection planes at 2θ=23.8o and another low intensity Cu2Te peak representing (200)hex hexagonal reflection planes at around 2θ=24.8o were found for all the annealing times. Surface roughness and topography were viewed from the AFM images. Noteworthy changes were observed in the films surface roughness due to the different annealing times. The surface roughness values imply rising trend for lower annealing times. Bulk carrier density was in the order of 1018cm-3. The highest carrier concentration of 7.1×1018cm-3 was achieved for the films annealed for 15 min.
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