硅真空系统中的表面闪络

G. Gradinaru, V. Madangarli, T. Sudarshan
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引用次数: 11

摘要

研究了高压激励下硅-真空系统的预击穿响应特性。处理了最常见的由表面闪络引起的系统故障。系统在高场脉冲状态下的特殊响应特性表明了硅-真空系统与固体-绝缘体-真空系统的本质区别。提出了硅真空系统表面闪络物理模型的主要思想。根据所提出的模型讨论了表面闪络响应的性质。为了更好地理解硅真空系统的表面闪络物理过程,引入了系统表面闪络灵敏度的概念。>
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Surface flashover in silicon-vacuum systems
The properties of the prebreakdown response of silicon-vacuum systems under HV excitation are presented. The most frequent case of system breakdown by surface flashover is treated. The particular properties of the system response in the high-field pulsed regime demonstrate the essential differences between the silicon-vacuum and solid-insulator-vacuum systems. The main ideas of a new physical model of surface flashover in silicon-vacuum systems are presented. The properties of the surface flashover response are discussed in terms of the proposed model. A concept called system surface flashover sensitivity is introduced to provide a better understanding of the surface flashover physical process in silicon-vacuum systems. >
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