氙锡放电等离子体极紫外光源的实验研究

M. Watanabe, N. Kishi, J. Yamada, O. Sakuchi, J. Fei, Zhu Qiushi, A. Okino, K. Horioka, E. Hotta
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摘要

近年来,在气体放电和激光辅助极紫外光源领域取得了很大的进展。为了实现极紫外光刻,我们一直在开发以Xe或Sn为燃料的放电等离子体极紫外光源。为了产生高质量的无碎片EUV辐射,开发了一种Xe气体喷射z夹紧放电系统。构建并介绍了一种25kA脉冲电源系统。光学特性的观测目前正在进行中。此外,还构建了锡电极激光触发放电等离子体系统。在我们的系统中,Nd-YAG激光照射在锡电极表面触发主放电后,在电极之间产生的锡等离子体产生极紫外辐射,并沿径向收集。在阳极-阴极间隙处提供了约6 kA的最大放电电流,脉宽为500 ns。本研究利用带内量热计,定量测量了气体喷射Z夹捏Xe等离子体和激光触发Sn放电等离子体发出的极紫外辐射。利用针孔相机系统进行了带内源图像的时间分辨测量。
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Experimental study of xenon and tin discharge produced plasma EUV light source
Recently, a lot of progresses have been made in the field of gas discharge and laser assisted extreme ultraviolet (EUV) light sources. In order to realize the EUV lithography, we have been developing the discharge produced plasma EUV light source with either Xe or Sn fuels. A Xe gas jet Z-pinch discharge system has been developed for generating high quality debris-free EUV emission. A 25kA pulsed power supply system has been constructed and introduced. Observation of optical characteristics are presently in progress. Also, the laser triggered discharge produced plasma with Sn electrode system has been constructed. In our system, after Nd-YAG laser was irradiated on Sn electrode surface for triggering the main discharge, EUV radiation will occur from the generated Sn plasma between electrodes and be collected radially. The maximum discharge current of about 6 kA with a pulse width of 500 ns was supplied to anode-cathode gap. In present study, EUV radiation emitted from gas jet Z- pinch Xe plasma and laser triggered Sn discharge produced plasma was quantitatively measured using an in-band calorimeter. Time-resolved in-band source image measurement was also conducted using a pinhole camera system.
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