源漏对侧栅极对AlGaN/GaN高电子迁移率晶体管器件的影响

Shengting Luo, Xianyun Liu, Xingfang Jiang
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摘要

为了探究不同栅极位置对AlGaN/GaN高电子迁移率晶体管器件性能的影响,本文提出了两种模型结构:倒置T型栅源漏相对侧结构(ITGS-DOSS)和嵌入式ITGS-DOSS。仿真结果表明,与传统的T型栅极结构相比,这两种结构具有更好的转移特性,并且显著降低了导态电阻,可以有效地改善虚拟栅极效应,抑制电流崩溃效应。此外,这两种结构还可以改善器件的频率特性,最大截止频率分别约为625 GHz和635 GHz。ITGS-DOSS的阈值电压约为- 30 V,与传统的T型结构相比,阈值电压明显左移。当栅漏间距为4.4 μm时,击穿电压仍高达1661 V。随着器件尺寸和栅极漏极间距的减小,该结构具有更好的耐压特性,从而实现低阈值和高击穿器件性能。
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Effect of Source–Drain Opposite Side Gate on the AlGaN/GaN High Electron Mobility Transistor Devices
To explore the influence of different gate positions on the performance of AlGaN/GaN high electron mobility transistor devices, two model structures are proposed in this paper: an inverted T‐type gate and source–drain opposite side structure (ITGS–DOSS), and an embedded ITGS–DOSS. It is shown in the simulation results that compared with the traditional T‐type gate structure, these two structures have better transfer characteristics and significantly reduce the on‐state resistance, which can effectively improve the virtual gate effect and suppress the current collapse effect. Furthermore, these two structures can also improve the frequency characteristics of the device, with a maximum cutoff frequency of about 625 and 635 GHz, respectively. The threshold voltage of the ITGS–DOSS is about −30 V, which is significantly shifted to the left compared to the traditional T‐type structure. With a gate–drain spacing of 4.4 μm, the breakdown voltage is still as high as 1661 V. As the device size and gate–drain spacing decrease, this structure has better voltage withstand characteristics, thus achieving low threshold and high breakdown device performance.
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