基于z切割铌酸锂的无线可拉伸SAW传感器

Cécile Floer, S. Hage-Ali, Louis Verzellesi, L. Badie, O. Elmazria, S. Zhgoon
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引用次数: 0

摘要

表面声波设备越来越多地被用作传感器,特别是因为它们可以无电池、无线和无封装。由于这些特点,它们在监测人体参数的柔性电子领域变得特别有趣。通过将薄铌酸锂z形切割衬底与超薄可拉伸天线相结合,演示了远程温度测量。增加两层保护层以获得无封装结构似乎有望实现皮肤上的无线温度测量。
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Wireless stretchable SAW sensors based on Z-cut lithium niobate
Surface acoustic wave devices are increasingly used as sensors, especially because they can be batteryless, wireless and packageless. With these features they become particularly interesting in the field of flexible electronics for the monitoring of the human body parameters. By combining a thinned lithium niobate Z-cut substrate to ultrathin and stretchable antennas, a remote temperature measurement has been demonstrated. The addition of two protective layers to obtain a packageless structure seems promising to achieve wireless temperature measurements on the skin.
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