K. Srinivasarao, G. Srinivasarao, K. Madhuri, K. Murthy, P. Mukhopadhyay
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Preparation and Characterization of R.F. Magnetron Sputtered Mo:ZnO Thin Films
The ZnO and Mo:ZnO thin films were deposited by radio frequency magnetron sputtering on quartz and intrinsic silicon (100) substrates at a fixed combined partial pressure mbar of Ar