热处理对Ti-Al薄膜结构的影响

S.E Romankov, S Suleeva, T.V Volkova, E Ermakov
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引用次数: 3

摘要

基于TiAl和Ti3Al的钛铝化物是高温航天应用的潜在材料。它们的低密度、高温抗蠕变性和强度、高抗氧化性,使其成为极具潜力的发动机材料。在此基础上制定防护涂层和高温涂层的加工策略是合理的。通过磁控溅射,获得了与靶材相对应的Ti-48%铝合金薄膜。当退火时,发现铝原子扩散到衬底中。重新分配和均衡的电影作品在体积发生。退火后的薄膜含有较高的钛浓度。溅射时,薄膜中形成了ti3al基亚稳相。该相是薄膜中的主要相,在不同的衬底上具有不同的形态。它稳定,退火时不分解。在退火过程中,形成了只在一定温度和浓度范围内稳定的中间亚稳相。薄膜微观结构的结构、相变动力学和演化取决于衬底的结构和形貌。
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Influence of thermal treatment on the structure of Ti–Al films

Titanium aluminides based on TiAl and Ti3Al are potential materials for high temperature aerospace application. Their low density, high temperature creep resistance and strength, high oxidation resistance, make them excellent potential engine materials. It is reasonable to develop processing strategies for protective and high temperature coatings based on them. On magnetron sputtering the Ti–48% Al alloy films, the composition of which corresponds to the target’s one, have been obtained. When annealed, the aluminium atoms have been discovered to diffuse into the substrate. The redistribution and the leveling of the films’ compositions in the volume take place. After annealing the film contains a higher titanium concentration. On sputtering the formation of the Ti3Al-based metastable phase in the films has been observed. This phase is the main one in the films and has a different morphology on different substrates. It is stable and doesn’t decompose at annealing. During annealing the new intermediate metastable phases, which are stable only within a definite temperature and concentration range, have developed. The structure, kinetics of phase transformation and evolution of the film microstructures depend on the structure and morphology of the substrate.

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