飞秒激光辅助湿法蚀刻Nd: yag晶体用于光子波导制造

2021 Photonics North (PN) Pub Date : 2021-05-31 DOI:10.1109/PN52152.2021.9597849

T. Lipateva, A. Okhrimchuk, A. Lipatiev, S. Lotarev, V. Sigaev

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摘要

我们报道了脉冲能量和激光束扫描速度变化对飞秒激光辅助湿法刻蚀Nd:YAG晶体的控制和增强的影响，从而产生空心磁道。应用优化的激光曝光参数可以提高初始阶段的蚀刻速率

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Femtosecond laser-assisted wet etching of Nd:Y AG crystals for photonics waveguide fabrication

We report the effect of the pulse energy and laser beam scanning speed variation on control and intensification of the femtosecond laser-assisted wet etching of Nd:YAG crystals resulting in the fabrication of hollow tracks. Applying the optimized laser exposure parameters enables an increase of the etching rates at the initial stages

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2021 Photonics North (PN)

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