{"title":"热塑性薄板微金字塔结构连续热压成形工艺的优化","authors":"L. Haponow, J. Kettle, J. Allsop","doi":"10.1116/6.0000551","DOIUrl":null,"url":null,"abstract":"Reported is the manufacture and optimization of inverted micropyramid cavity structures into thermoplastic sheets using roll-to-roll (R2R) embossing. To manufacture the master, an ultraprecision diamond machining method was applied to create seamless surface structures into a copper-coated hot embossing roller. Using the hot embossing process, the roller features were successfully transferred to 2 mm thick polymethyl methacrylate (PMMA) sheets. Optimization of the R2R control process variables was conducted using Taguchi's numerical methods, which showed the importance of the roller temperature for a successful pattern transfer. The work presents a novel fabrication technique that allows microstructures to be manufactured into thick PMMA sheets in a continuous process.","PeriodicalId":17652,"journal":{"name":"Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena","volume":"30 1","pages":"012203"},"PeriodicalIF":0.0000,"publicationDate":"2021-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":"{\"title\":\"Optimization of a continuous hot embossing process for fabrication of micropyramid structures in thermoplastic sheets\",\"authors\":\"L. Haponow, J. Kettle, J. Allsop\",\"doi\":\"10.1116/6.0000551\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Reported is the manufacture and optimization of inverted micropyramid cavity structures into thermoplastic sheets using roll-to-roll (R2R) embossing. To manufacture the master, an ultraprecision diamond machining method was applied to create seamless surface structures into a copper-coated hot embossing roller. Using the hot embossing process, the roller features were successfully transferred to 2 mm thick polymethyl methacrylate (PMMA) sheets. Optimization of the R2R control process variables was conducted using Taguchi's numerical methods, which showed the importance of the roller temperature for a successful pattern transfer. The work presents a novel fabrication technique that allows microstructures to be manufactured into thick PMMA sheets in a continuous process.\",\"PeriodicalId\":17652,\"journal\":{\"name\":\"Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena\",\"volume\":\"30 1\",\"pages\":\"012203\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"6\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1116/6.0000551\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1116/6.0000551","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Optimization of a continuous hot embossing process for fabrication of micropyramid structures in thermoplastic sheets
Reported is the manufacture and optimization of inverted micropyramid cavity structures into thermoplastic sheets using roll-to-roll (R2R) embossing. To manufacture the master, an ultraprecision diamond machining method was applied to create seamless surface structures into a copper-coated hot embossing roller. Using the hot embossing process, the roller features were successfully transferred to 2 mm thick polymethyl methacrylate (PMMA) sheets. Optimization of the R2R control process variables was conducted using Taguchi's numerical methods, which showed the importance of the roller temperature for a successful pattern transfer. The work presents a novel fabrication technique that allows microstructures to be manufactured into thick PMMA sheets in a continuous process.