带热交换器的空气制备系统

2019 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus) Pub Date : 2019-01-01 DOI:10.1109/EICONRUS.2019.8657289

Zakharov Artem, P. Thu, T. Oo, R. Andrei, Bogacheva Ekaterina

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引用次数: 0

摘要

本文采用外部学方法对微电子洁净室的空气制备和过滤系统进行了热力学分析。在本文中使用了两种系统:直接流动系统和使用热交换器系统。在本报告中，对所考虑的方案的火用效率及其主要要素的火用损失进行了说明。得到了一年中冷暖季节空气准备系统研究系统的火用流及其损失方案。通过对火用损失的分析，可以根据自然-技术地质系统的气候条件，为微电子洁净室选择最优的空气准备方案。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Exergetic Analysis Air Preparation System with Heat Exchanger

In this work using an extertological method of thermodynamic analysis of the air preparation and filtration system in clean rooms of microelectronics have been carried out.In this article two systems have been used: a direct flow system and using a heat exchanger system. In this account the exergy efficiency for the schemes under consideration and exergy losses in its main elements has been made. The schemes of exergy flows and their losses for the research system of the air preparation system for warm and cold seasons of the year have been obtained.The analysis of exergy loss allows choosing the most optimal air preparation scheme for clean rooms of microelectronics depending on the climatic conditions of natural-technical geosystem.

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2019 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus)

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