微波辐射局部效应下半导体结构热过程发展的动力学

E. P. Taran, Y. Gordienko, N. Slipchenko
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引用次数: 0

摘要

本文讨论了微波辐射在半导体结构中的局部效应模型的基本原理。基于时域有限差分(FDTD)方法,验证了该模型的有效性。确定了球面探头半径对半导体结构轴线上场强分布和值的影响。得到了半导体结构局部区域热过程发展的连续模式与电物理参数对温度的关系。
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Dynamics of development of thermal processes in semiconductor structures at the local effects of microwave radiation
The present paper concerns the basic principles of the model of local effects of microwave radiation in semiconductor structures. The validity of the proposed model is based on the method of finite-difference time-domain (FDTD) is shown. The influence of radius of a spherical probe on the distribution and values of the field intensity in the axis of semiconductor structures is determined. Dynamics of development of thermal processes in the local region of semiconductor structures in a continuous mode with relation to electrophysical parameters on temperature are obtained.
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