cu掺杂ZnO薄膜的表征及掺杂效应

K. K. Kyaw, Hla Toe
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引用次数: 1

摘要

以Cu(NO3)2·3H2O(硝酸铜)和Zn(NO3)2·6H2O(硝酸锌)为原料,采用化学共沉淀法合成了Cu(铜)掺杂氧化锌。溶液中掺杂剂的重量百分比分别为Cu(2、3、5 wt %)。采用丝网印刷方法在p-Si(100)衬底上制备了cu掺杂ZnO薄膜。在300 ~ 700℃的不同温度下对cu掺杂ZnO/Si薄膜进行退火处理。本研究采用简单沉淀法制备了cu掺杂ZnO结构,并通过XRD (x射线衍射)和SEM(扫描电镜)等多种技术对其进行了表征。测量了cu掺杂ZnO/Si的电学性能。发现cu掺杂ZnO/Si薄膜可以用作光电器件。
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Characterization and Doping Effect of Cu-Doped ZnO Films
Cu (copper)-doped ZnO (zinc oxide) was synthesized using Cu(NO3)2·3H2O (copper (II) nitrate) and Zn(NO3)2·6H2O (zinc nitrate) by chemical co-precipitation method. The weight percentages of dopant in solution were Cu (2, 3, and 5 wt %). Cu-doped ZnO thin films were prepared on p-Si (100) substrate by screen printing method. Cu-doped ZnO/Si films were annealed at different temperatures from 300 to 700 °C. In this study, Cu-doped ZnO structures were prepared by a simple precipitation technique, and characterized by various techniques such as XRD (X-ray diffraction) and SEM (scanning electron microscope). The electrical properties of Cu-doped ZnO/Si were measured. It has found that Cu-doped ZnO/Si films can be used as optoelectronic devices.
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