{"title":"紧凑离子微束系统中萃取条件优化减小光束直径","authors":"Takeru Ohkubo, Yasuyuki Ishii","doi":"10.1016/j.phpro.2017.09.022","DOIUrl":null,"url":null,"abstract":"<div><p>A several hundred keV class compact proton microbeam system was developed as a prototype of a 1 MeV compact microbeam system to be used in micro-fabrication and micro-analyses. Optimization of an extraction condition was performed to increase demagnification and to achieve a beam diameter of approximately 1<!--> <!-->μm. The beam diameter measurement showed that a diameter of 1.8<!--> <!-->μm was obtained. This indicates that the compact microbeam system is a feasible alternative to a MeV class conventional large accelerator system.</p></div>","PeriodicalId":20407,"journal":{"name":"Physics Procedia","volume":"90 ","pages":"Pages 79-84"},"PeriodicalIF":0.0000,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/j.phpro.2017.09.022","citationCount":"5","resultStr":"{\"title\":\"Beam Diameter Reduction by Optimization of an Extraction Condition in a Compact Ion Microbeam System\",\"authors\":\"Takeru Ohkubo, Yasuyuki Ishii\",\"doi\":\"10.1016/j.phpro.2017.09.022\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>A several hundred keV class compact proton microbeam system was developed as a prototype of a 1 MeV compact microbeam system to be used in micro-fabrication and micro-analyses. Optimization of an extraction condition was performed to increase demagnification and to achieve a beam diameter of approximately 1<!--> <!-->μm. The beam diameter measurement showed that a diameter of 1.8<!--> <!-->μm was obtained. This indicates that the compact microbeam system is a feasible alternative to a MeV class conventional large accelerator system.</p></div>\",\"PeriodicalId\":20407,\"journal\":{\"name\":\"Physics Procedia\",\"volume\":\"90 \",\"pages\":\"Pages 79-84\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1016/j.phpro.2017.09.022\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Physics Procedia\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S1875389217301815\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Physics Procedia","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S1875389217301815","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Beam Diameter Reduction by Optimization of an Extraction Condition in a Compact Ion Microbeam System
A several hundred keV class compact proton microbeam system was developed as a prototype of a 1 MeV compact microbeam system to be used in micro-fabrication and micro-analyses. Optimization of an extraction condition was performed to increase demagnification and to achieve a beam diameter of approximately 1 μm. The beam diameter measurement showed that a diameter of 1.8 μm was obtained. This indicates that the compact microbeam system is a feasible alternative to a MeV class conventional large accelerator system.
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