用于OPFET的纳米晶金刚石薄膜的表面结构研究

2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics Pub Date : 2009-10-30 DOI:10.1109/CLEOPR.2009.5292469

Q. Fang, Linjun Wang, Jian Huang, K. Tang, Yi Zhang, Qinkai Zeng, J. Min, Wei-min Shi, Yiben Xia

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摘要

采用原子力显微镜(AFM)、拉曼光谱(Raman spectroscopy)、傅里叶红外光谱(FTIR spectroscopy)和霍尔效应(Hall effect)对纳米金刚石薄膜进行了分析。证明了薄膜的表面结构、电导率和CH拉伸键。

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Studies on the surface structure of nanocrystalline diamond films for OPFET applications

AFM, Raman spectroscopy, FTIR spectroscopy and Hall effect measurements were used to analyze nanocrystalline diamond film. The surface structure and conductivity as well as CH stretching bonds of the film was demonstrated.

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2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics

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