{"title":"高Q氮化硅纳米机械谐振器的相位噪声","authors":"K. Fong, W. Pernice, H. Tang","doi":"10.1364/CLEO_SI.2012.CW3M.4","DOIUrl":null,"url":null,"abstract":"We study noise characteristics of high Q silicon nitride nanomechanical resonators integrated in a nanophotonic circuit. Quality factor up to 2.2 million is measured and an intrinsic frequency noise spectrum with kBT/f dependence is observed.","PeriodicalId":6442,"journal":{"name":"2012 Conference on Lasers and Electro-Optics (CLEO)","volume":"44 1","pages":"1-2"},"PeriodicalIF":0.0000,"publicationDate":"2012-05-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Phase noise of high Q silicon nitride nanomechanical resonators\",\"authors\":\"K. Fong, W. Pernice, H. Tang\",\"doi\":\"10.1364/CLEO_SI.2012.CW3M.4\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We study noise characteristics of high Q silicon nitride nanomechanical resonators integrated in a nanophotonic circuit. Quality factor up to 2.2 million is measured and an intrinsic frequency noise spectrum with kBT/f dependence is observed.\",\"PeriodicalId\":6442,\"journal\":{\"name\":\"2012 Conference on Lasers and Electro-Optics (CLEO)\",\"volume\":\"44 1\",\"pages\":\"1-2\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-05-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2012 Conference on Lasers and Electro-Optics (CLEO)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/CLEO_SI.2012.CW3M.4\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 Conference on Lasers and Electro-Optics (CLEO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/CLEO_SI.2012.CW3M.4","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Phase noise of high Q silicon nitride nanomechanical resonators
We study noise characteristics of high Q silicon nitride nanomechanical resonators integrated in a nanophotonic circuit. Quality factor up to 2.2 million is measured and an intrinsic frequency noise spectrum with kBT/f dependence is observed.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
