{"title":"电子隧穿传感器","authors":"S.B. Waltman, W.J. Kaiser","doi":"10.1016/0250-6874(89)87073-8","DOIUrl":null,"url":null,"abstract":"<div><p>New methods have been developed to implement position sensors based on electron tunneling. The electron tunneling methods enable position to be detected with sub-Ångstrom resolution using a compact mechanical structure and simple electronic control elements. A prototype accelerometer is the first sensor based on these principles; it shows reliable operation with a 10 μg/√Hz noise-limited sensitivity and abandwidth of approximately 3 kHz. Based on these results, it is expected that tunnel sensors optimized for many applications will enable an entirely new class of sensors to be developed.</p></div>","PeriodicalId":101159,"journal":{"name":"Sensors and Actuators","volume":"19 3","pages":"Pages 201-210"},"PeriodicalIF":0.0000,"publicationDate":"1989-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0250-6874(89)87073-8","citationCount":"88","resultStr":"{\"title\":\"An electron tunneling sensor\",\"authors\":\"S.B. Waltman, W.J. Kaiser\",\"doi\":\"10.1016/0250-6874(89)87073-8\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>New methods have been developed to implement position sensors based on electron tunneling. The electron tunneling methods enable position to be detected with sub-Ångstrom resolution using a compact mechanical structure and simple electronic control elements. A prototype accelerometer is the first sensor based on these principles; it shows reliable operation with a 10 μg/√Hz noise-limited sensitivity and abandwidth of approximately 3 kHz. Based on these results, it is expected that tunnel sensors optimized for many applications will enable an entirely new class of sensors to be developed.</p></div>\",\"PeriodicalId\":101159,\"journal\":{\"name\":\"Sensors and Actuators\",\"volume\":\"19 3\",\"pages\":\"Pages 201-210\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1989-09-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1016/0250-6874(89)87073-8\",\"citationCount\":\"88\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Sensors and Actuators\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/0250687489870738\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"2002/1/30 0:00:00\",\"PubModel\":\"Epub\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Sensors and Actuators","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/0250687489870738","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"2002/1/30 0:00:00","PubModel":"Epub","JCR":"","JCRName":"","Score":null,"Total":0}
New methods have been developed to implement position sensors based on electron tunneling. The electron tunneling methods enable position to be detected with sub-Ångstrom resolution using a compact mechanical structure and simple electronic control elements. A prototype accelerometer is the first sensor based on these principles; it shows reliable operation with a 10 μg/√Hz noise-limited sensitivity and abandwidth of approximately 3 kHz. Based on these results, it is expected that tunnel sensors optimized for many applications will enable an entirely new class of sensors to be developed.
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