蒸发铝层附着力表征方法的研究

Julia Kumm, D. Eberlein, P. Hartmann, W. Wolke, A. Wolf, R. Preu
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引用次数: 1

摘要

本文分析了用物理气相沉积法(PVD)在钝化发射极和后硅太阳能电池(PERC)后钝化层上沉积铝(Al)后金属化层粘附质量的测量方法。由于太阳能电池附着力测试的标准测试程序无法应用,因此引入了剥离试验和直接拉法来测量测试样品的附着力;附着力评价标准的制定和应用。对粘接试验的结果进行了比较,结果基本一致。讨论了两种方法的适用性,发现剥离试验结果更可靠,而直接拉法更容易制备。此外,测试样品的结果表明,PERC太阳能电池的PVD后金属化具有良好的粘附质量。
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Investigation of methods for adhesion characterization of evaporated aluminum layers
This paper analyzes methods for measuring the adhesion quality of aluminum (Al) rear metallization deposited by means of physical vapour deposition (PVD) on rear passivation layers of passivated emitter and rear silicon solar cells (PERC). Since the standard test procedures for adhesion testing of solar cells cannot be applied, a peel-test and a direct-pull method are introduced and used for measuring the adhesion of test samples; criteria for adhesion evaluation are developed and applied. The results of adhesion tests are compared and are in good general agreement. The applicability of the two methods is discussed and it is found that the peel-test shows more reliable results whereas the direct-pull method is easier in preparation. Moreover, the results of the test samples show sufficiently good adhesion quality for the PVD rear metallization of PERC solar cells.
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