用田口法制备溶胶-凝胶结合浸渍法制备ZnO薄膜

Modou Pilor, B. Hartiti, A. Dioum, H. Labrim, Y. Arba, A. Belafhaili, M. Tahri, S. Fadili, B. Ba, P. Thevenin
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引用次数: 2

摘要

采用田口技术,采用浸涂溶胶-凝胶法制备了ZnO薄膜。其基本原理是使尽可能小的东西成为检测的措施,并使开发具有优异性能的ZnO薄膜的最佳条件变得有意义。我们采用L9的试验方案,有高、中、低三个层次,退火温度、前驱体浓度、浸涂速度、退火时间四要素。每篇论文安排了三种溶胶-凝胶排列,测试重复三次。我们选择根据得到的薄膜透过率计算出的间隙能进行优化。用分光光度计对样品进行表征。这种表征使我们能够绘制出透射率曲线,并推断出每个沉积ZnO薄膜的间隙能。采用信噪比和方差分析(ANOVA)来确定其光学和电学特性。采用紫外可见光谱、x射线衍射、扫描电子显微镜(SEM)和能谱仪(EDS)等表征方法对最佳条件下制备的膜进行了表征。在宣誓条件下的合法陈述下,ZnO薄膜显示出较高的晶体质量,透光率高达90%。
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The Use of Taguchi Method to Elaborate Good ZnO Thin Films by Sol Gel Associated to Dip Coating
ZnO thin films have been prepared by dip coating sol gel method using Taguchi technique. The underlying principle was to make something as little as conceivable the measure of examination and make sense of the best conditions for developing ZnO thin films with great properties. We used a trial plan of L9, with three levels (high, medium, low) and four elements (annealing temperature, precursor concentration, dip coating speed, annealing time). For each paper three sol-gel arrangements were arranged, and test is rehashed three time. We have chosen to carry out the optimization based on the gap energy calculated from the transmittance of the films obtained. Each sample was characterized with spectrophotometer. This characterization allowed us to draw the transmittance curve and to deduce the gap energy of each deposited ZnO thin film. A signal to noise and an analysis of variance (ANOVA) were used to determine the optical and electrical properties. The film that we obtained with the optimal condition was exanimated by using the characterization methods like UV-visible spectroscopy, X-ray diffraction, SEM (Scanning Electron Microscopy) and EDS (Energy Dispersive Spectroscopy). With the legal statement under oath condition, ZnO thin film showed high crystal quality and the transmittance is a greater amount of 90%.
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