磁各向异性的机械调谐

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI:10.1109/MEMS46641.2020.9056417

M. M. Torunbalci, S. Bhave

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引用次数: 0

摘要

本文演示了利用磁致伸缩效应对CoFeB铁磁薄膜(FM)磁各向异性的压电机械操纵。在AlN悬臂梁底部制作了20nm厚的CoFeB电阻器，并通过测量各向异性磁阻(AMR)来检测其磁化变化。悬臂弯曲引起的CoFeB带材单轴应变的AMR变化22%，磁各向异性旋转20°。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Mechanical Tuning of Magnetic Anisotropy

This paper demonstrates piezo-mechanical manipulation of magnetic anisotropy in a thin-film CoFeB ferromagnet (FM) via magnetostriction effect. A 20 nm thick CoFeB resistor is fabricated at the base of an AlN cantilever and its magnetization change is detected by measuring anisotropic magnetoresistance (AMR). The uniaxial strain induced in the CoFeB strip by cantilever bending exhibits a 22% change in AMR and rotates the magnetic anisotropy by 20°.

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2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)

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