锗纳米结构中工艺诱导的应变带隙减小

P. Velha, D. Paul, M. Myronov, D. Leadley
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引用次数: 1

摘要

我们研究了拉伸应变锗纳米结构的光致发光。先制备亚微米光栅和柱,然后涂覆应变氮化硅薄膜。利用不同的沉积条件和不同的结构尺寸可以控制纳米结构中的应力。样品的光学特性测量表明,直接带隙向1.9 μm以上的更高波长发生了剧烈的位移。这种对锗纳米结构中应力的局部控制为1.6 μm波长以上的发射体和光电探测器开辟了道路,这是不易获得的,也有可能成为锗激光器。
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Process-induced strain bandgap reduction in Germanium nanostructures
We studied the photoluminescence of tensile strained germanium nanostructures. Sub-micron gratings and pillars were fabricated before being coated with strained silicon nitride films. Using different deposition conditions and different sizes of structures the stress in the nanostructures can be controlled. The measured optical properties of the samples show that the direct band-gap is shifted drastically towards higher wavelengths over 1.9 μm. This local control of the stress in germanium nanostructures opens the route for both emitters and photodetectors above 1.6 μm wavelength which are not easily available and also potentially towards a germanium laser.
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