D. Mangelinck, M. Putero, M. Descoins, C. Perrin-Pellegrino
{"title":"热应力下gete基相变材料堆的稳定性:结合原位x射线衍射、薄片电阻和原子探针层析成像研究了与Ti的反应","authors":"D. Mangelinck, M. Putero, M. Descoins, C. Perrin-Pellegrino","doi":"10.1109/IITC-MAM.2015.7325629","DOIUrl":null,"url":null,"abstract":"In situ sheet resistance and x-ray diffraction measurements were used simultaneously during heat treatment to study Ti electrodes in contact with Ge-Te phase change materials. Ti is found to react with GeTe forming TiTe2 and Ge. Atom probe tomography analyses confirm the presence of these two phases after a 400°C heat treatment.","PeriodicalId":6514,"journal":{"name":"2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM)","volume":"8 1","pages":"71-74"},"PeriodicalIF":0.0000,"publicationDate":"2015-05-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Stability of GeTe-based phase change material stack under thermal stress: Reaction with Ti studied by combined in-situ x-ray diffraction, sheet resistance and atom probe tomography\",\"authors\":\"D. Mangelinck, M. Putero, M. Descoins, C. Perrin-Pellegrino\",\"doi\":\"10.1109/IITC-MAM.2015.7325629\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In situ sheet resistance and x-ray diffraction measurements were used simultaneously during heat treatment to study Ti electrodes in contact with Ge-Te phase change materials. Ti is found to react with GeTe forming TiTe2 and Ge. Atom probe tomography analyses confirm the presence of these two phases after a 400°C heat treatment.\",\"PeriodicalId\":6514,\"journal\":{\"name\":\"2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM)\",\"volume\":\"8 1\",\"pages\":\"71-74\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-05-18\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IITC-MAM.2015.7325629\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IITC-MAM.2015.7325629","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Stability of GeTe-based phase change material stack under thermal stress: Reaction with Ti studied by combined in-situ x-ray diffraction, sheet resistance and atom probe tomography
In situ sheet resistance and x-ray diffraction measurements were used simultaneously during heat treatment to study Ti electrodes in contact with Ge-Te phase change materials. Ti is found to react with GeTe forming TiTe2 and Ge. Atom probe tomography analyses confirm the presence of these two phases after a 400°C heat treatment.
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