铬原子光刻

U. Drodofsky, M. Drewsen, B. Brezger, G. Schreiber, D. Krogmann, C. Weber, J. Stuhler, T. Pfau, J. MIynsk
{"title":"铬原子光刻","authors":"U. Drodofsky, M. Drewsen, B. Brezger, G. Schreiber, D. Krogmann, C. Weber, J. Stuhler, T. Pfau, J. MIynsk","doi":"10.1109/CLEOE.1996.562396","DOIUrl":null,"url":null,"abstract":"Standing laser waves serve as an array of lenses for a well collimated and laser cooled chromium beam. A siljcon substrate put inlo the focal plane of that array can be patterned with lines or dots with a periodicity of half the wavelength of the light [l]. We report on an intenfie beam (at 80 cm from the nomce the 5nx corresponds to an evaporation rate of 0.8 A/E) of chromium We produce up to 300 mW of laser light (425 nm) by frequency doubling a TkSaphire-laser in a KNbO3-crystal. We did systematic studies of Dopplerand Sisyphus-cooling mechanisms in different configurations and can cool the chromium beam transversely down to a few recoil units The m u l l s are in excellent agreement with quantum Monte Carlo simulations. In contrast to mechanically coUimatiiig t h P bea.m we do not loomintenuity in the atomic beam, leading to deposition timea a6 high as 10 nmimin We report on experimentfi o n wr i t ing periodic nanostracturea (see fig. 1) with chromium with standing light fields generated by (.his syfitem. The written structures are characterised with an atomic force microscope. In a fiitilrr t l t ~ p t l i e scheme will be extended to two dimensions and different patterns.","PeriodicalId":11780,"journal":{"name":"EQEC'96. 1996 European Quantum Electronic Conference","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2002-08-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Atom Lithography with Chromium\",\"authors\":\"U. Drodofsky, M. Drewsen, B. Brezger, G. Schreiber, D. Krogmann, C. Weber, J. Stuhler, T. Pfau, J. MIynsk\",\"doi\":\"10.1109/CLEOE.1996.562396\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Standing laser waves serve as an array of lenses for a well collimated and laser cooled chromium beam. A siljcon substrate put inlo the focal plane of that array can be patterned with lines or dots with a periodicity of half the wavelength of the light [l]. We report on an intenfie beam (at 80 cm from the nomce the 5nx corresponds to an evaporation rate of 0.8 A/E) of chromium We produce up to 300 mW of laser light (425 nm) by frequency doubling a TkSaphire-laser in a KNbO3-crystal. We did systematic studies of Dopplerand Sisyphus-cooling mechanisms in different configurations and can cool the chromium beam transversely down to a few recoil units The m u l l s are in excellent agreement with quantum Monte Carlo simulations. In contrast to mechanically coUimatiiig t h P bea.m we do not loomintenuity in the atomic beam, leading to deposition timea a6 high as 10 nmimin We report on experimentfi o n wr i t ing periodic nanostracturea (see fig. 1) with chromium with standing light fields generated by (.his syfitem. The written structures are characterised with an atomic force microscope. In a fiitilrr t l t ~ p t l i e scheme will be extended to two dimensions and different patterns.\",\"PeriodicalId\":11780,\"journal\":{\"name\":\"EQEC'96. 1996 European Quantum Electronic Conference\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2002-08-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"EQEC'96. 1996 European Quantum Electronic Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/CLEOE.1996.562396\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"EQEC'96. 1996 European Quantum Electronic Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CLEOE.1996.562396","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

驻波激光作为一个阵列的透镜为一个良好的准直和激光冷却铬束。将硅衬底置于该阵列的焦平面中,可以用周期性为光波长一半的线或点来形成图案[1]。我们报道了铬的强光束(距离中心80厘米处,5nx对应于0.8 A/E的蒸发速率)。我们通过在knbo3晶体中加倍频率的tksaphire激光器产生高达300 mW (425 nm)的激光。我们对不同构型的多普勒和西西弗斯冷却机制进行了系统的研究,并可以将铬束横向冷却到几个反冲单位,这与量子蒙特卡罗模拟结果非常吻合。与机械计算P值相反。我们报道了一项实验,利用()产生的恒光场,用铬制备周期纳米结构(见图1)。他的syfitem。用原子力显微镜对书写结构进行了表征。在此基础上,将该方案扩展到二维和不同的模式。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
Atom Lithography with Chromium
Standing laser waves serve as an array of lenses for a well collimated and laser cooled chromium beam. A siljcon substrate put inlo the focal plane of that array can be patterned with lines or dots with a periodicity of half the wavelength of the light [l]. We report on an intenfie beam (at 80 cm from the nomce the 5nx corresponds to an evaporation rate of 0.8 A/E) of chromium We produce up to 300 mW of laser light (425 nm) by frequency doubling a TkSaphire-laser in a KNbO3-crystal. We did systematic studies of Dopplerand Sisyphus-cooling mechanisms in different configurations and can cool the chromium beam transversely down to a few recoil units The m u l l s are in excellent agreement with quantum Monte Carlo simulations. In contrast to mechanically coUimatiiig t h P bea.m we do not loomintenuity in the atomic beam, leading to deposition timea a6 high as 10 nmimin We report on experimentfi o n wr i t ing periodic nanostracturea (see fig. 1) with chromium with standing light fields generated by (.his syfitem. The written structures are characterised with an atomic force microscope. In a fiitilrr t l t ~ p t l i e scheme will be extended to two dimensions and different patterns.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Recent Progress of Nonlinear Short-Pulse Tunable VUV and XUV Generation Nanostructures be Laser Direct Etching of Silicon Analysis Of Optical Pattern Formation By Symmetry Autocorrelation Functions Multiple Ionization and Coulomb Explosion of Mercury Clusters in Femtoscecond Laser Fields Atoms in Cavities Quantum Entanglement and Quantum Computing
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1