Yong Han, B. L. Lau, G. Tang, Seow Meng Low, J. Goh
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Package-Level Si Micro-Fluid Cooler with Enhanced Jet Array for High Performance 3D Systems
The Si micro-fluid cooler, combining micro-jet array impingement, micro-channel flow and micro-trench drainage, has been designed and experimentally evaluated. Enhanced jet array impingement has been achieved by eliminating the negative cross-flow effect among adjacent nozzles. Low thermal resistance